diff --git a/core/common/src/main/java/alluxio/underfs/ObjectUnderFileSystem.java b/core/common/src/main/java/alluxio/underfs/ObjectUnderFileSystem.java
index 9da66147a418..67841627e176 100755
--- a/core/common/src/main/java/alluxio/underfs/ObjectUnderFileSystem.java
+++ b/core/common/src/main/java/alluxio/underfs/ObjectUnderFileSystem.java
@@ -727,8 +727,6 @@ private boolean renameDirectoryInternal(String src, String dst, DeleteBuffer del
     if (!copyObject(srcKey, stripPrefixIfPresent(convertToFolderName(dst)))) {
       return false;
     }
-    deleteBuffer.add(srcKey);
-
     // Rename each child in the src folder to destination/child
     // a. Since renames are a copy operation, files are added to a buffer and processed concurrently
     // b. Pseudo-directories are metadata only operations are not added to the buffer
@@ -746,6 +744,9 @@ private boolean renameDirectoryInternal(String src, String dst, DeleteBuffer del
         buffer.add(new Pair<>(childSrcPath, childDstPath));
       }
     }
+    // The files are arranged in the order of the parent directories
+    // to avoid the failure of deleting the directories first.
+    deleteBuffer.add(srcKey);
     // Get result of parallel file renames
     int filesRenamed = buffer.getResult().size();
     if (filesRenamed != buffer.mEntriesAdded) {
diff --git a/core/server/master/src/main/java/alluxio/master/file/DefaultFileSystemMaster.java b/core/server/master/src/main/java/alluxio/master/file/DefaultFileSystemMaster.java
index eaa58ce570f0..67a54f3be3f3 100644
--- a/core/server/master/src/main/java/alluxio/master/file/DefaultFileSystemMaster.java
+++ b/core/server/master/src/main/java/alluxio/master/file/DefaultFileSystemMaster.java
@@ -3157,6 +3157,27 @@ && shouldPersistPath(
         }
       }
     }
+    // After rename succeeds, avoid this asynchronous persistence task
+    if (srcInode.isDirectory() && !context.getPersist()) {
+      LOG.debug("The source directory {} has been renamed, "
+          + "cancel the child persistence task.", srcInodePath);
+      try (LockedInodePathList descendants = mInodeTree.getDescendants(srcInodePath)) {
+        for (LockedInodePath childPath : descendants) {
+          Inode childInode = childPath.getInode();
+          if (childInode.isFile() && !childInode.isPersisted()) {
+            long fileId = childInode.getId();
+            LOG.debug("Cancel the child {} persistence task, file id {}", childPath, fileId);
+            // Remove the file from the set of files to persist.
+            mPersistRequests.remove(fileId);
+            // Cancel any ongoing jobs.
+            PersistJob job = mPersistJobs.get(fileId);
+            if (job != null) {
+              job.setCancelState(PersistJob.CancelState.TO_BE_CANCELED);
+            }
+          }
+        }
+      }
+    }
   }
 
   /**
diff --git a/job/server/src/main/java/alluxio/job/plan/persist/PersistDefinition.java b/job/server/src/main/java/alluxio/job/plan/persist/PersistDefinition.java
index 694aa4fdc80e..ea6f3301b44e 100644
--- a/job/server/src/main/java/alluxio/job/plan/persist/PersistDefinition.java
+++ b/job/server/src/main/java/alluxio/job/plan/persist/PersistDefinition.java
@@ -18,6 +18,7 @@
 import alluxio.client.file.URIStatus;
 import alluxio.collections.Pair;
 import alluxio.conf.Configuration;
+import alluxio.exception.status.CancelledException;
 import alluxio.grpc.OpenFilePOptions;
 import alluxio.grpc.ReadPType;
 import alluxio.job.RunTaskContext;
@@ -43,6 +44,8 @@
 
 import java.io.IOException;
 import java.io.OutputStream;
+import java.util.ArrayList;
+import java.util.Collections;
 import java.util.List;
 import java.util.Random;
 import java.util.Set;
@@ -126,7 +129,9 @@ public SerializableVoid runTask(PersistConfig config, SerializableVoid args,
       if (!uriStatus.isCompleted()) {
         throw new IOException("Cannot persist an incomplete Alluxio file: " + uri);
       }
-      long bytesWritten;
+      long bytesWritten = 0;
+      List<String> successMkdirsList = new ArrayList<>();
+      boolean isTaskSuccess = true;
       try (Closer closer = Closer.create()) {
         OpenFilePOptions options = OpenFilePOptions.newBuilder()
             .setReadType(ReadPType.NO_CACHE)
@@ -149,6 +154,10 @@ public SerializableVoid runTask(PersistConfig config, SerializableVoid args,
           curUfsPath = curUfsPath.getParent();
         }
         while (!ancestorUfsAndAlluxioPaths.empty()) {
+          if (Thread.currentThread().isInterrupted()) {
+            LOG.warn("Task received interrupt signal, may be cancelled.");
+            throw new CancelledException("Interrupted before create directory and copy file");
+          }
           Pair<String, String> ancestorUfsAndAlluxioPath = ancestorUfsAndAlluxioPaths.pop();
           String ancestorUfsPath = ancestorUfsAndAlluxioPath.getFirst();
           String ancestorAlluxioPath = ancestorUfsAndAlluxioPath.getSecond();
@@ -164,6 +173,7 @@ public SerializableVoid runTask(PersistConfig config, SerializableVoid args,
             List<AclEntry> allAcls = Stream.concat(status.getDefaultAcl().getEntries().stream(),
                 status.getAcl().getEntries().stream()).collect(Collectors.toList());
             ufs.setAclEntries(ancestorUfsPath, allAcls);
+            successMkdirsList.add(ancestorUfsPath);
           } else if (!ufs.isDirectory(ancestorUfsPath)) {
             throw new IOException(
                 "Failed to create " + ufsPath + " with permission " + options
@@ -180,6 +190,22 @@ public SerializableVoid runTask(PersistConfig config, SerializableVoid args,
         ufs.setAclEntries(dstPath.toString(), allAcls);
         bytesWritten = IOUtils.copyLarge(in, out, new byte[8 * Constants.MB]);
         incrementPersistedMetric(ufsClient.getUfsMountPointUri(), bytesWritten);
+      } catch (Exception e) {
+        isTaskSuccess = false;
+        LOG.warn("Failed run persiste task of {}, case {}", ufsPath, e.getMessage());
+        throw e;
+      } finally {
+        if (!isTaskSuccess) {
+          LOG.warn("The created directory needs to be rolled back and deleted, directory size {}.",
+              successMkdirsList.size());
+          ufs.deleteExistingFile(ufsPath);
+          Collections.reverse(successMkdirsList);
+          for (String path : successMkdirsList) {
+            if (!ufs.deleteDirectory(path)) {
+              LOG.warn("Failed delete ufs path {}", path);
+            }
+          }
+        }
       }
       LOG.info("Persisted file {} with size {}", ufsPath, bytesWritten);
     }